Titanium oxide (TiO₂) films have several advantages for applications in solar cells and very commonly used as a photo-catalyst for degradation of environmental pollutants. In this study, TiO₂ films were synthesized using, a simple, less expensive, low temperature and convenient for large area deposition method, a chemical bath deposition (CBD) and their structural and optical properties were examined at various calcinations temperatures.

The X-ray diffraction (XRD) technique shows the presence of the picks characteristic of anatase phase after annealing our films at 500°C, 600°C and rutile phase appears after heat treatment at 700°C. The surface morphology of the deposited films was characterized by the FEG scanning electronic microscopy (FEGSEM) and atomic force microscopy (AFM). Energy dispersive X-ray spectroscopy (EDS) analysis was used to determine the chemical composition of the prepared films. The UV-Vis-NIR spectroscopy shows that the film exhibits a transmission around 60%. The indirect band gap of the deposited films was between 2.88 and 3.22 eV.