Moroccan Journal of Condensed Matter, Vol 2 (1999)

Optical study of titanium dioxide thin films prepared by R.F. sputtering

A. Dakka, J. Lafait, M. Abd-Lefdil, C. Sella

Abstract


Optical response of TiO2 layers, prepared by R.F. sputtering from TiO2 target, was studied as a function of target state, oxygen partial pressure and sputtering power. We have found that TiO2 layers deposited from a used target exhibit a high absorptance which decreases greatly when an oxygen partial pressure is introduced. Whereas an increase of sputtering power leads to an absorbent TiO2 matrix.