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Optical study of titanium dioxide thin films prepared by R.F. sputtering


 
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1. Title Title of document Optical study of titanium dioxide thin films prepared by R.F. sputtering
 
2. Creator Author's name, affiliation, country A. Dakka; Laboratoire de Physique des Matériaux, Université Mohammed V, Faculté des Sciences, Avenue Ibn Batouta, BP. 1014 Rabat; Morocco
 
2. Creator Author's name, affiliation, country J. Lafait; Laboratoire d’Optique des Solides, Université Pierre et Marie Curie, UA au CNRS N° 781 - Case 80, 4 place Jussieu, 75 252 Paris Cedex 05; France
 
2. Creator Author's name, affiliation, country M. Abd-Lefdil; Laboratoire de Physique des Matériaux, Université Mohammed V, Faculté des Sciences, Avenue Ibn Batouta, BP. 1014 Rabat; Morocco
 
2. Creator Author's name, affiliation, country C. Sella; Laboratoire d’Optique des Solides, Université Pierre et Marie Curie, UA au CNRS N° 781 - Case 80, 4 place Jussieu, 75 252 Paris Cedex 05; Morocco
 
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4. Description Abstract Optical response of TiO2 layers, prepared by R.F. sputtering from TiO2 target, was studied as a function of target state, oxygen partial pressure and sputtering power. We have found that TiO2 layers deposited from a used target exhibit a high absorptance which decreases greatly when an oxygen partial pressure is introduced. Whereas an increase of sputtering power leads to an absorbent TiO2 matrix.
 
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7. Date (YYYY-MM-DD) 07-03-2011
 
8. Type Status & genre Peer-reviewed Article
 
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9. Format File format PDF
 
10. Identifier Uniform Resource Identifier https://revues.imist.ma/index.php/MJCM/article/view/52
 
11. Source Title; vol., no. (year) Moroccan Journal of Condensed Matter; Vol 2 (1999)
 
12. Language English=en en
 
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