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PKP Metadata Items |
Metadata for this Document |
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| 1. |
Title |
Title of document |
RF Power Effect On Structural Characteristics Of Amorphous Carbon Nitride Thin Films Deposited By Reactive Radiofrequency Sputtering |
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| 2. |
Creator |
Author's name, affiliation, country |
A. Essafti; Laboratoire de Physique des Solides et des Couches Minces, Département de Physique, Faculté des Sciences – Semlalia –, Université Cadi Ayyad, B.P. 2390, 40000 Marrakech; Morocco |
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| 2. |
Creator |
Author's name, affiliation, country |
J.L.G. Fierro; ICP, CSIC, Campus Universidad Autónoma de Madrid; Spain |
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| 2. |
Creator |
Author's name, affiliation, country |
E. Ech-chamikh; Laboratoire de Physique des Solides et des Couches Minces, Département de Physique, Faculté des Sciences – Semlalia –, Université Cadi Ayyad, B.P. 2390, 40000 Marrakech; Morocco |
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Subject |
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Subject |
Keyword(s) |
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| 4. |
Description |
Abstract |
Amorphous carbon nitride thin films were deposited, at room temperature, on silicon substrates by reactive radiofrequency (RF) sputtering from a graphite target in an atmosphere of nitrogen. The structural properties were investigated by Raman spectroscopy. This spectroscopy reveals the presence of C–C, C=C, C=N and C≡N bonding types. The Raman intensity (ID/IG) ratio of disorder and graphitic bands increased from 1.29 to 2.67 with increasing the RF power from 100 to 400W indicating an increase of structural disorder. |
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Publisher |
Organizing agency, location |
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Contributor |
Sponsor(s) |
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| 7. |
Date |
(YYYY-MM-DD) |
21-03-2011
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| 8. |
Type |
Status & genre |
Peer-reviewed Article |
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Type |
Type |
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| 9. |
Format |
File format |
PDF |
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| 10. |
Identifier |
Uniform Resource Identifier |
https://revues.imist.ma/index.php/MJCM/article/view/280 |
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| 11. |
Source |
Title; vol., no. (year) |
Moroccan Journal of Condensed Matter; Vol 12, No 3 (2010) |
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| 12. |
Language |
English=en |
en |
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Relation |
Supp. Files |
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Coverage |
Geo-spatial location, chronological period, research sample (gender, age, etc.) |
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Rights |
Copyright and permissions |
Copyright (c)
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