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PKP Metadata Items |
Metadata for this Document |
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| 1. |
Title |
Title of document |
Electrical and structural characterisation of plasma-polymerized TEOS thin films as humidity sensors |
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| 2. |
Creator |
Author's name, affiliation, country |
N. Guermat; Laboratoire des Etudes de Matériaux d’Electronique pour Applications Médicales (LEMEAMED), Faculté des Sciences de l’Ingénieur, Université Mentouri de Constantine 25000; Algeria |
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| 2. |
Creator |
Author's name, affiliation, country |
A. Bellel; Laboratoire des Etudes de Matériaux d’Electronique pour Applications Médicales (LEMEAMED), Faculté des Sciences de l’Ingénieur, Université Mentouri de Constantine 25000; Algeria |
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| 2. |
Creator |
Author's name, affiliation, country |
S. Sahli; Laboratoire de Microsystèmes et Instrumentation (LMI), Faculté des Science de l’Ingénieur, Université Mentouri de Constantine 25000; Algeria |
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| 2. |
Creator |
Author's name, affiliation, country |
Y. Segui; Laboratoire Plasma et Conversion d’Energie (LAPLACE), Université Paul Sabatier, 118 route de Narbonne - 31062 Toulouse; France |
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| 2. |
Creator |
Author's name, affiliation, country |
P. Raynaud; Laboratoire Plasma et Conversion d’Energie (LAPLACE), Université Paul Sabatier, 118 route de Narbonne - 31062 Toulouse; France |
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| 3. |
Subject |
Discipline(s) |
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Subject |
Keyword(s) |
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| 4. |
Description |
Abstract |
In this study, we used plasma polymerization of TEOS to deposit thin water molecule sensitive layers on two intredigitated aluminum electrodes evaporated on glass substrate. Electrical and structural analyses of the deposited sensitive layers have been evaluated through current-impedance responses and FTIR spectroscopy. The elaborated humidity resistive sensor exhibited a detectable response to relative humidity (RH) percentages ranging from 20 to 95%. The films showed good sensitivity to water molecule due to the presence of hydroxyl groups OH. These groups provide the adsorption sites for water and play an important role to the humidity sensor properties. The low impedance, good sensitivity as characterized by a linear change in impedance from 106 to 103 Ω over RH interval of 20–80% and low observed hysteresis of about 4%, make the elaborated layer a promising candidate for humidity sensors development. |
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| 5. |
Publisher |
Organizing agency, location |
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| 6. |
Contributor |
Sponsor(s) |
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| 7. |
Date |
(YYYY-MM-DD) |
21-03-2011
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| 8. |
Type |
Status & genre |
Peer-reviewed Article |
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| 8. |
Type |
Type |
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| 9. |
Format |
File format |
PDF |
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| 10. |
Identifier |
Uniform Resource Identifier |
https://revues.imist.ma/index.php/MJCM/article/view/276 |
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| 11. |
Source |
Title; vol., no. (year) |
Moroccan Journal of Condensed Matter; Vol 12, No 3 (2010) |
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| 12. |
Language |
English=en |
en |
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| 13. |
Relation |
Supp. Files |
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| 14. |
Coverage |
Geo-spatial location, chronological period, research sample (gender, age, etc.) |
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| 15. |
Rights |
Copyright and permissions |
Copyright (c)
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