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TEM study of GaN/AlN quantum dots deposited on vicinal silicon


 
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1. Title Title of document TEM study of GaN/AlN quantum dots deposited on vicinal silicon
 
2. Creator Author's name, affiliation, country M. Benaissa; CNRST, Angle Allal Fassi / FAR, B.P. 8027 N.U. Hay Riad, 10000 Rabat; Morocco
 
2. Creator Author's name, affiliation, country P. Vennéguès; CRHEA-CNRS, rue Bernard Grégory, 06560 Valbonne; France
 
2. Creator Author's name, affiliation, country F. Semond; CRHEA-CNRS, rue Bernard Grégory, 06560 Valbonne; France
 
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4. Description Abstract

Transmission electron microscopy was performed to investigate the use of AlN epitaxial films deposited on vicinal Si(111) as templates for the growth of GaN quantum dots. It is found that the substrate vicinality induces both a slight tilt of the AlN (0001) direction with respect to the (111) direction and a step bunching mechanism. As a consequence, a dislocation dragging behavior is observed giving rise to dislocation-free areas well suited for the nucleation of GaN quantum dots. The microstructure of different QD encountered in the GaN/AlN system is also described.

 
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7. Date (YYYY-MM-DD) 17-03-2011
 
8. Type Status & genre Peer-reviewed Article
 
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9. Format File format PDF
 
10. Identifier Uniform Resource Identifier https://revues.imist.ma/index.php/MJCM/article/view/226
 
11. Source Title; vol., no. (year) Moroccan Journal of Condensed Matter; Vol 11, No 2 (2009): First Moroccan Days of Nanoscience Nanotechnology
 
12. Language English=en en
 
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15. Rights Copyright and permissions Copyright (c)