RF Power Effect On Structural Characteristics Of Amorphous Carbon Nitride Thin Films Deposited By Reactive Radiofrequency Sputtering
ESSAFTI, A.; FIERRO, J.L.G.; ECH-CHAMIKH, E..
RF Power Effect On Structural Characteristics Of Amorphous Carbon Nitride Thin Films Deposited By Reactive Radiofrequency Sputtering.
Moroccan Journal of Condensed Matter, [S.l.], v. 12, n. 3, mar. 2011.
ISSN 1114-2073. Available at: <https://revues.imist.ma/index.php/MJCM/article/view/280/278>. Date accessed: 15 nov. 2023.