Electrical and structural characterisation of plasma-polymerized TEOS thin films as humidity sensors
GUERMAT, N. et al.
Electrical and structural characterisation of plasma-polymerized TEOS thin films as humidity sensors.
Moroccan Journal of Condensed Matter, [S.l.], v. 12, n. 3, mar. 2011.
ISSN 1114-2073. Available at: <https://revues.imist.ma/index.php/MJCM/article/view/276>. Date accessed: 15 nov. 2023.