Modeling Of Residual Stresses In Thin Films Of Y2O3 Deposited On Si Substrate, SrTiO3 and MgO
BOUALAM, Abdellah et al.
Modeling Of Residual Stresses In Thin Films Of Y2O3 Deposited On Si Substrate, SrTiO3 and MgO.
Moroccan Journal of Condensed Matter, [S.l.], v. 12, n. 2, mar. 2011.
ISSN 1114-2073. Available at: <https://revues.imist.ma/index.php/MJCM/article/view/270/268>. Date accessed: 15 nov. 2023.