Development Of A One Dimensional Fluid Model, Application To Electropositive And Electronegative Gases In DC Discharge

Abstract

The objective of the work presented in this paper is to develop a numerical calculation program which simulates the behavior of charged species in deposition reactor by cold plasma in DC glow discharge. After applying some simplifying assumptions, we developed a model of fluid type in MATLAB using the numerical method of finite differences. We applied the model to simulate the plasma in the case of an electropositive (He) and an electronegative (SF6) gases in terms of spatial distribution of charged particles, electric field and electric potential between electrodes space.