Investigation Of Pores Influence on Dielectric Constant Value in Low k Materials Using Monte Carlo Method

Abstract

This paper investigates the pores influence on dielectric constant of low-k materials. Cylindrical, hexagonal and cubic pores shapes have been investigated using Monte-Carlo Method. Mixture composed of matrix and cylindrical pores presents the low dielectric constant with minimum of porosity. Moreover, new formula concerning volume scale transformation is proposed for making the usual mixing rules based on two phases more useful to predict the dielectric constant value in mixture composed for different pores shapes. To assess the performance of this new approach, Lichtenecker and Volume Average Theory mixing rules have been used through classical models and applying volume scale transformation. The obtained results show the success of volume scale transformation method. The proposed technique may have the potential in analyzing other properties such as electrical conductivity and thermal conductivity in porous ultra low-k dielectrics.