PZT thin films preparation by pyrosol process

Abstract

Lead Zirconate titanate [Pb(Zr,Ti)O₃] thin films were deposited on Si (111) substrates by pyrosol process based on the pyrolysis on a heated substrate of an aerosol produced by the ultrasonic spraying of a solution. The films were characterized by X-ray diffraction to control the morphology and the preferential orientation of the thin film.