Optimization of thin film growth: Materials for energy storage and conversion

Abstract

Through three examples taken in the field of energy storage and conversion, this paper reports how the property of thin films can be optimized by tuning the growth conditions. Focusing on the influence of the film composition, the substrate temperature and the pressure, oxides, fluorides, metal and hydrides thin films were successfully grown using the Pulsed Laser Deposition technique. A careful screening among a large range of metal addition (M=Co, Ta, W<20 %) enables the determination of the Ta and W compositions leading to the highest cycling stability of electrochromic Ni-based oxide thin films cycled in KOH electrolyte. The optical properties of Mg thin films are strongly sensitive to the chamber pressure as shiny metallic and transparent films are deposited in vacuum and under an Ar/H2 mixture, respectively. Optical changes were also achieved by ex situ hydrogenation of Mg-Cx films. Finally, the benefit of enlarging substrate temperatures to negative values is illustrated through the example of FeF_x thin films, for which the substrate temperature is a key factor governing the FeF₂ or/and FeF₃ phase deposition.