Synthesis of nanosilicamaterialstoday has become a considerableconcernbecause of itshigher-level of physicochemicalproperties and potential applications in variousfields. The aim of thispaperis to conduct a literaturereview on the synthesismethod of SiO₂nanoparticlesbased on 53 papersfrom 2002 to 2020. This paperwillpresent a study of severalmethods and materialsthat can beused for synthesis of SiO₂nanoparticles, including: sol-gel method, coprecipitation, spray flame pyrolysis, ultrasonication, alkali-fusion, autoclave, wetchemical, hydrolysis, and condensation reactions. The resultsshowedthatsynthesizedmaterials have a high level of puritysothatit can beused as an alternative source of silica in severaltechnologicalfields, such as optics, electronics and biomedicinewhere the particle size, crystal structure, purity, and morphology are depend on the synthesismethodused.